Project Examples

This page contains some project examples. not all projects are shown because of secrecy of projects:

Particle measurement head

An optical mechanical system that can measure particles with a high accuracy

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Ion measuring device

A second generation mechanism system to generate a 360 inspection view for ions movement in vacuum

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Source qualification Tool

a compleet qualification system to qualify a plasma source inclusive several mechanisms, sensor etc all in vacuum

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Full range pre load mechanism

This is a mechansim that has over it full range the same pre load and is used in a vacuum envoiroment

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In-vacuum Tape Outgas Test

in this system is a long roll of tape placed and will have a outgas test during roll off

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Hacs

an optical system that works in cryo enviroment and needs to have the same optical focus during room and at cryo temperatures. so there is a negative thermal expension system build into it.

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Production machine for solar cells

a inline solar cell production cell. this procedure is in vacuum inclusive loadloacks, heaters etc. This machine was developed adnd build in cooperation with OTB

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Reticle Handler

Together with TNO we developed a Reticle Handler for the semi conductor industry. Later we developed the final version for the HVM machine in Wilton (USA)

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Gaja

refocus system on a satelite in cryogene envoiroment

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In vacuum mirror actuator

mirror system that can make two angle's for positioning a laser (rendered picture)

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Dual pod in cleaning system

A loadlock, library, exchange port and robot handling to place EUV reticles in a cleaning system

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In vacuum Scara Robot

a scara robot that can have a high load and works in vacuum with a extreem low outgassing budget

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contactless water speed sensor

this system is placed in a schip and can measure water speed under the ship to prodict cavitation

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diesel support car

railroad car for maintenance

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5 microrad double alignment mirror

this mirror system can be positioned with a accuracy of 5 micronrad in two directions with a very high stability

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ion measurement device

in vacuum 360 degrees rotating mechanism for measuring ions

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Particle tester 80nm

Particle tester to look for particle's larger then 60-80nm

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Particle tester for EIP's

Cleanroom test setup for testing for particles generation. this setup can make a movement million times inclusive oumo and vent cycli

tester