Project Examples
This page contains some project examples. not all projects are shown because of secrecy of projects:
Fast Micro pellicle Scanner
A stand alone particle scanner that scan larger surfaces from round 150x150mm one second and can see particles from 0.5 micron up to 20 micron.(particles of 100nm can already been seen!) it 's generates a report with particle size, position and intensity
Fast Micro Particle Scanner
A stand alone particle scanner that scan surfaces from round 26mm in one second and can see particles from 0.5 micron up to 20 micron.(particles of 100nm can already been seen!) it 's generates a report with particle size, position and intensity
After placing the particle sample into the measurement device it will give direct an overview of the particles, size, positioning and a number of details at the screen. see next image
Ion measuring device
A second generation mechanism system to generate a 360 inspection view for ions movement in vacuum
Source qualification Tool
a compleet qualification system to qualify a plasma source inclusive several mechanisms, sensor etc all in vacuum
Full range pre load mechanism
This is a mechansim that has over it full range the same pre load and is used in a vacuum envoiroment
In-vacuum Tape Outgas Test
in this system is a long roll of tape placed and will have a outgas test during roll off
Hacs
an optical system that works in cryo enviroment and needs to have the same optical focus during room and at cryo temperatures. so there is a negative thermal expension system build into it.
Production machine for solar cells
a inline solar cell production cell. this procedure is in vacuum inclusive loadloacks, heaters etc. This machine was developed adnd build in cooperation with OTB
Reticle Handler
Together with TNO we developed a Reticle Handler for the semi conductor industry. Later we developed the final version for the HVM machine in Wilton (USA)
Gaja
refocus system on a satelite in cryogene envoiroment
In vacuum mirror actuator
mirror system that can make two angle's for positioning a laser (rendered picture)
Dual pod in cleaning system
A loadlock, library, exchange port and robot handling to place EUV reticles in a cleaning system
In vacuum Scara Robot
a scara robot that can have a high load and works in vacuum with a extreem low outgassing budget
contactless water speed sensor
this system is placed in a schip and can measure water speed under the ship to prodict cavitation
diesel support car
railroad car for maintenance
5 microrad double alignment mirror
this mirror system can be positioned with a accuracy of 5 micronrad in two directions with a very high stability
ion measurement device
in vacuum 360 degrees rotating mechanism for measuring ions
Particle tester 80nm
Particle tester to look for particle's larger then 60-80nm
Particle tester for EIP's
Cleanroom test setup for testing for particles generation. this setup can make a movement million times inclusive oumo and vent cycli
